Collisionless expansion of pulsed radio frequency plasmas. II. Parameter study
نویسندگان
چکیده
منابع مشابه
Collisionless expansion of pulsed rf plasmas II: Parameter study
The plasma parameter dependencies of the dynamics during the expansion of plasma are studied with the use of a versatile particle-in-cell simulation tailored to a plasma expansion experiment. The plasma expansion into a low-density ambient plasma features a propagating ion front that is preceding a density plateau. It has been shown that the front formation is entangled with a wave-breaking mec...
متن کاملCollisionless expansion of pulsed rf plasmas I: Front formation
The dynamics during plasma expansion are studied with the use of a versatile particle-in-cell simulation with a variable neutral gas density profile. The simulation is tailored to an rf plasma expansion experiment. The experiment has shown the existence of a propagating ion front. The ion front features a strong electric field and features a sharp plasma potential drop similar to a double layer...
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It has been hypothesized that high-energy impact of very small silicon nanoparticles on a substrate may lead to epitaxial growth of silicon films at low substrate temperature. A possible means for producing such energetic nanoparticle fluxes involves pulsing an RF silane-containing plasma, and applying a positive DC bias to the substrate during the afterglow phase of each pulse so as to collect...
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ژورنال
عنوان ژورنال: Physics of Plasmas
سال: 2016
ISSN: 1070-664X,1089-7674
DOI: 10.1063/1.4940676